AL18 Microwave Plasma Etcher System

Aluminium chamber with 18L volume.

The Alpha Plasma System AL18 is ideal for small-volume production, pilot line manufacturing and R&D purposes. Still important, the system will meet the full 360 degrees of today’s requirements in advanced chip packaging.

The AL18 system is also featuring the innovative Alpha Plasma design and microwave coupling. The tool is truly versatile. Proven ECR technique is just an example from the wide range of operating modes. The classic rotary table configuration is available as well.

Applications

• Wire bonding
• Die assembly applications:
• Flip-Chip underfill
• Improving solder ball attach

Features

• Efficient microwave plasma cleaning
• Small footprint for R&D purposes
• 2.45 GHz microwave power adjustable between 50 and 600 Watts
• Up to 4 mass flow controllers
• ECR Option
• Automatic and manual operation